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Dutch semiconductor equipment maker ASML Holding NV (NASDAQ:ASML) today reported its Q1 revenue increased 95% year-over-year to $2.11 billion, beating the consensus estimate for $1.92 billion. Net profit for the quarter was $570 million, up from $155 million in the year ago quarter.The company said it is confident of posting another record year in 2011, despite uncertainty across the sector about the impact of the recent Japanese disaster.The disaster has affected the semiconductor industry and will have some impact on ASML, but the effect on the company's supply chain is negligible, CFO Peter Wennink said.Chief Executive Eric Meurice said, "The semiconductor manufacturers are certainly showing caution in assessing the economic impact of the Japanese earthquake on their supply chain as well as on the overall end-product market; some customers have indeed re-timed a limited number of deliveries." Shares of ASML Holding are trading down 6.04% at $39.85.